Cathode Material Dependence on Macroscopic Process Properties in DLC Film Preparation using Filtered Cathodic Arc Deposition
نویسندگان
چکیده
منابع مشابه
Filtered cathodic arc deposition with ion-species-selective bias.
A dual-cathode arc plasma source was combined with a computer-controlled bias amplifier to synchronize substrate bias with the pulsed production of plasma. In this way, bias can be applied in a material-selective way. The principle has been applied to the synthesis of metal-doped diamondlike carbon films, where the bias was applied and adjusted when the carbon plasma was condensing and the subs...
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In this study, Ti, Al and N doped DLC – referred to here after as “(Ti,Al)CN/DLC composite”- coating and pure diamond-like coating (DLC) were produced by cathodic arc deposition technique and the effects of the coating thickness on their tribological properties were evaluated. The coatings were characterized, using scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffrac...
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ژورنال
عنوان ژورنال: SHINKU
سال: 2004
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.47.200